The Brooks Instrument GF100 / GF120 / GF125 mass flow controllers build upon Brooks’ leadership position in UHP digital mass flow controllers. The wetted flow paths are 10 u inch Ra or 4 u inch Ra finish with SEMI F-20 compliance. Multi gas/multi range (MG/MR) is a proprietary technology available on all Brooks GF Series MFCs. MG/MR Technology allows the user to program the MFC for desired gas and flow range anywhere, anytime without removing the MFC from the gas panel.